Semiconductor Inspection

In the semiconductor industry, the fastest cycle times, dynamics and precision in the nanometer range are required - exactly the right challenge for Triamec Servo Drives.

These applications often use air bearings, which are difficult to control due to their weak damping. This is where Triamec servo drives with their 100kHz control can fully exploit their advantages: Minimal settling time combined with best noise suppression results in stable, robust processes.

Typical for the production of large LCD panels are gantry systems, which have to position very precisely and must also move very evenly. Triamec has developed special algorithms for this purpose, which run directly on the involved servo drives and guarantee optimum load balancing in 10kHz - without any higher-level control and its complexity.