Semiconductor Inspection

In the semiconductor industry, the fastest cycle times, dynamics and precision in the nanometer range are required - exactly the right challenge for Triamec Servo Drives.

These applications often use air bearings, which are difficult to control due to their weak damping. This is where Triamec servo drives with their 100kHz control can fully exploit their advantages: Minimal settling time combined with best noise suppression results in stable, robust processes.

Gantry systems are typical. Triamec offers advanced MIMO gantry directly on the involved servo drives with optimum load balancing at 100kHz - without the dead time and complexity of higher-level control.